High sensitivity capacitive flexible pressure sensor based on ionic membrane

Journal Information

J. Hefei Univ. Tech. (Nat. Sci.), Sept.2024, Vol.47 No.9: 1170-1175

DOI: 10.3969/j.issn.1003-5060.2024.09.003

Authors

LIU Ping $ ^{1} $, WANG Xiaojia $ ^{1} $, LIU Caixia $ ^{1} $, TIAN Helei $ ^{1} $, XU Baohua $ ^{2} $, ZHANG Encan $ ^{2} $

(1. School of Microelectronics, Hefei University of Technology, Hefei 230601, China; 2. Chuzhou Power Supply Company, State Grid Anhui Electric Power Co., Ltd., Chuzhou 239000, China)

Abstract and Keywords

Abstract: In order to meet the needs of precise measurement of subtle human physiological signals, by adopting polyvinyl alcohol and potassium hydroxide as the materials, and combined with sandpaper reverse mold technology, this paper produces a kind of high sensitivity flexible capacitive pressure sensor with microstructured composite ionic membrane dielectric layer. The production process of the sensor is described, the chemical characteristics of the ionic membrane are characterized, and the dielectric layer material ratio and microstructure size are analyzed and optimized. Then, the static and dynamic characteristics of the sensor are tested, and the sensor is applied to the human fingertip pulse wave measurement. The results show that the sensor has high sensitivity ( $ 8.29\ kPa^{-1} $) and fast response time (45 ms). The sensor is installed in the finger clamp, and the pulse wave measurement system realizes the accurate measurement of the human fingertip pulse, which provides a new choice for the wearable medical electronic devices.

Keywords: pressure sensor; capacitive; ionic membrane; microstructure; high sensitivity

作者信息

刘平 $ ^{1} $，汪晓佳 $ ^{1} $，刘彩霞 $ ^{1} $，田合雷 $ ^{1} $，徐宝华 $ ^{2} $，张恩灿 $ ^{2} $

(1. 合肥工业大学微电子学院, 安徽合肥 230601; 2. 国网安徽省电力有限公司滁州供电公司, 安徽滁州 239000)

摘要和关键词

摘要: 针对精确测量微小人体生理信号的需求,文章采用聚乙烯醇、氢氧化钾为材料,结合砂纸倒模技术,制作一种具有微结构复合离子膜介电层的高灵敏柔性电容式压力传感器。详细阐述传感器制作流程,表征离子膜的化学特性,分析并优化介电层材料配比及微结构尺寸,在对传感器静态和动态特性进行测试后将之应用于人指尖脉搏波测量。结果表明,基于离子膜微结构介电层的柔性电容式传感器具有高灵敏度 $ (8.29\ \mathrm{kPa}^{-1}) $和快速响应时间 $ (45\ \mathrm{ms}) $,将该传感器安装到手指夹具中,通过脉搏波测量系统即可实现对人指尖脉搏的精确测量。该研究为可穿戴医疗电子设备提供了一种新的选择。

关键词: 压力传感器；电容式；离子膜；微结构；高灵敏

Funding

浙江省科学技术厅领雁资助项目（2022C03052；2024C01150）；安徽省教育厅协同创新资助项目（GXXT-2023-075）；中央高校基本科研业务费专项资金资助项目（JZ2020HGTB0027）；合肥工业大学大学生创新创业训练计划资助项目（S202210359267）和国家电网有限公司科技资助项目（B312M023000R）

合肥工业大学学报(自然科学版)

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