A scalable and highly sensitive capacitive pressure electronic skin

Journal Information

J. Hefei Univ. Tech. (Nat. Sci.), Nov.2024, Vol.47 No.11: 1441-1447

DOI: 10.3969/j.issn.1003-5060.2024.11.001

Authors

TENG Fei $ ^{1} $, WANG Zhenti $ ^{1} $, LIU Ping $ ^{2} $, GUO Xinxin $ ^{1} $, LIU Jian $ ^{1} $, GE Chunyu $ ^{1} $

(1. Chuzhou Power Supply Company, State Grid Anhui Electric Power Co., Ltd., Chuzhou 239000, China; 2. School of Microelectronics, Hefei University of Technology, Hefei 230601, China)

Abstract and Keywords

Abstract: In this paper, a capacitive sensing unit with pyramid-like microstructure was prepared by non-woven inverted mold. Then, based on the transmission mode of code division multiple access, the bus coding circuit structure of parallel acquisition was designed. Combining the capacitive sensing unit with the designed coding circuit, a scalable and highly sensitive capacitive pressure electronic skin (e-skin) was obtained. The results show that the capacitive sensing unit based on non-woven inverted mold has ultra-high sensitivity coefficient $ (1.69253\ \mathrm{kPa}^{-1}) $, fast response time (65 ms) and high repeatability (>1 250 cycles). The bus acquisition circuit structure based on code division multiple access can greatly improve the overall acquisition speed of the sensing system, under the scale of $ 4 \times 4 $ acquisition circuit, it is 16 times the acquisition speed of row and column scanning circuit, which significantly improves the real-time perception of e-skin information. In addition, the e-skin based on code division multiple access acquisition mode can still retain the complete transmission function under certain physical damage. This study provides a new solution for promoting real-time and accurate tactile perception of intelligent robots.

Keywords: electronic skin (e-skin); ultrasensitive; capacitive; code division multiple access; scalable array

作者信息

滕飞 $ ^{1} $，王贞体 $ ^{1} $，刘平 $ ^{2} $，郭欣欣 $ ^{1} $，刘健 $ ^{1} $，葛春雨 $ ^{1} $

(1. 国网安徽省电力有限公司滁州供电公司, 安徽滁州 239000; 2. 合肥工业大学微电子学院, 安徽合肥 230601)

摘要和关键词

摘要: 文章通过无纺布倒模制备具有类金字塔形微结构的电容式传感单元, 基于码分多址传输方式设计并行采集的总线式编码电路结构; 将电容式传感单元与所设计的编码电路结合, 得到一种可扩展的高灵敏电容式压力电子皮肤。结果表明: 基于无纺布倒模的电容式传感单元具有超高的灵敏系数 $ (1.69253\ \mathrm{kPa}^{-1}) $、快速响应时间 $ (65\ \mathrm{ms}) $和高重复性 $ (>1250\ \mathrm{次}) $; 基于码分多址的总线式采集电路结构可以极大地提高传感系统整体采集速率, 在 $ 4\times4 $采集电路规模下是行列扫描电路采集速度的16倍, 显著提升了电子皮肤信息感知的实时性; 基于码分多址采集模式的电子皮肤在一定的物理损伤下仍能保留完整的传输功能。该研究为推进智能机器人的实时精确触觉感知提供了一种新的解决思路。

关键词: 电子皮肤；超灵敏；电容式；码分多址；可扩展式阵列

Funding

浙江省“领雁”研发攻关计划资助项目（2022C03052）；中央高校基本科研业务费专项资金资助项目（JZ2020HGTB0027）和国网安徽省电力有限公司滁州供电公司科技资助项目（B312M023000R）

合肥工业大学学报(自然科学版)

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