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基于 PSS 改性石墨烯的高灵敏柔性应变传感器

Highly sensitive flexible strain sensor based on PSS modified graphene

期刊信息

合肥工业大学(自然科学版),2025年7月,第48卷第7期:872-877,974

DOI: 10.3969/j.issn.1003-5060.2025.07.002

作者信息

胡若海 $ ^{1} $,马渊明 $ ^{1} $,刘志 $ ^{1} $,陈贝宁 $ ^{1} $,刘思思 $ ^{1} $,杨晓明 $ ^{2} $

(1. 合肥工业大学微电子学院,安徽合肥 230601;2. 浙江欧仁新材料有限公司,浙江嘉善 314103)

摘要和关键词

摘要: 针对裂纹结构传感器应变范围小、稳定性差的问题,文章以改性聚苯乙烯磺酸钠(PSS)、石墨烯(GNPs)和硅橡胶(silicon rubber, SR)为材料,使用丝网印刷工艺制备一种具有双层裂纹结构的高灵敏电阻式柔性应变传感器。首先阐述该传感器制备流程,并对改性聚苯乙烯磺酸钠进行化学表征;然后分析传感器不同结构的导电机理并仿真得到双层裂纹结构的工作原理;最后对传感器的静动态特性进行测试。结果表明:所制备的双层裂纹结构柔性应变传感器在宽工作范围(0~85%应变)下具有超高的灵敏度(应变灵敏度系数GF值可达16 364)、快速响应时间(65 ms)以及优异的工作稳定性(>1 000次循环)。该传感器应用于人体脉搏信号检测,通过提取所得的脉搏波特征信号能够判断受试者心血管状况,表明其在可穿戴实时医疗监测领域具有良好的应用前景。

关键词: 应变传感器;电阻式;裂纹;微结构;高灵敏

Authors

HU Ruohai $ ^{1} $, MA Yuanming $ ^{1} $, LIU Zhi $ ^{1} $, CHEN Beining $ ^{1} $, LIU Sisi $ ^{1} $, YANG Xiaoming $ ^{2} $

(1. School of Microelectronics, Hefei University of Technology, Hefei 230601, China; 2. Zhejiang Ouren New Materials Co., Ltd., Jiashan 314103, China)

Abstract and Keywords

Abstract: To address the issue of small strain range and poor stability of crack-based sensors, this paper prepared a highly sensitive resistive flexible strain sensor with a double-layer crack structure by screening printing technology using modified sodium polystyrene sulfonate (PSS), graphene nanoplatelets (GNPs), and silicone rubber (SR) as materials. Firstly, the preparation process of the sensor was described, and the modified PSS was chemically characterized. Then, the conductive mechanism of the different structures of the sensor was analyzed, and the working principle of the double-layer crack structure was simulated. Finally, the static and dynamic characteristics of the sensor were tested. The results show that the prepared flexible strain sensor with double-layer crack structure has ultra-high sensitivity (gauge factor up to 16 364), fast response (65 ms) and excellent working stability (>1 000 cycles) under a wide working range (0–85% strain). The aforementioned sensor was applied to the detection of human pulse signals. By extracting the pulse wave characteristic signals obtained, it can be used to judge the cardiovascular condition of the subjects, showing a good application prospect in the field of wearable real-time medical monitoring.

Keywords: strain sensor; resistive; crack; microstructure; high sensitivity

基金信息

浙江省“领雁”研发攻关计划资助项目(2022C03052);安徽省教育厅协同创新资助项目(GXXT-2021-30)

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