合肥工业大学校徽

合肥工业大学学报自科版

合肥工业大学学报(自然科学版)

JOURNAL OF HEFEI UNIVERSITY OF TECHNOLOGY (NATURAL SCIENCE)

主管：中华人民共和国教育部

主办：合肥工业大学

ISSN 1003-5060, CN 34-1083/N

沟槽结构 $ \beta-Ga_{2}O_{3} $ SBD 的设计与仿真

Design and simulation of trenched β-Ga₂O₃ Schottky barrier diode

期刊信息

合肥工业大学（自然科学版），2025年2月，第48卷第2期：196-202，231

DOI: 10.3969/j.issn.1003-5060.2025.02.008

作者信息

杨震，吴春艳，吴霞，高金绪龙，陈强，解光军

（合肥工业大学微电子学院，安徽合肥 230601）

摘要和关键词

摘要: 在肖特基势垒二极管(Schottky barrier diode, SBD)漂移层表面刻蚀沟槽形成金属-绝缘体-半导体(metal-insulator-semiconductor, MIS)结构, 抑制镜像力效应并减小器件的反向漏电流, 是提升器件反向击穿特性的有效途径。为优化沟槽结构 $ \beta-Ga_{2}O_{3} $ SBD 的结构参数, 文章利用 Silvaco Atlas 软件仿真不同台面宽度和沟槽深度对器件性能的影响。结果表明, 参数优化后(台面宽度 1.0 $ \mu $m, 沟槽深度 0.5 $ \mu $m)的沟槽结构 $ \beta-Ga_{2}O_{3} $ SBD 开启电压为 0.6 V、比导通电阻为 1.69 m $ \Omega \cdot $ cm $ ^{2} $、击穿电压为 1416 V、功率品质因数为 1.19 GW/cm $ ^{2} $, 实现了兼具低开启电压和高击穿电压的良好器件性能。与基础结构 SBD 和场板结构 SBD 相比, 优化后的器件性能得到显著提升。

关键词: $ \beta-Ga_{2}O_{3} $；肖特基势垒二极管（SBD）；沟槽结构；功率器件仿真

Authors

YANG Zhen, WU Chunyan, WU Xia, GAO Jinxulong, CHEN Qiang, XIE Guangjun

(School of Microelectronics, Hefei University of Technology, Hefei 230601, China)

Abstract and Keywords

Abstract: The metal-insulator-semiconductor (MIS) structure formed by trenching the drift layer of Schottky barrier diode (SBD) can restrict the image force and reduce the reverse leakage current, which has proved to be effective in improving the reverse breakdown characteristics of the device. To optimize the structure parameters of trenched $ \beta $-Ga $ _{2} $O $ _{3} $ SBD, the effect of mesa width and trench depth on the device performance was researched by simulation using Silvaco Atlas. Results revealed that the trenched $ \beta $-Ga $ _{2} $O $ _{3} $ SBD with the mesa width of 1.0 $ \mu $m and trench depth of 0.5 $ \mu $m presented the turn-on voltage of 0.6 V, specific on-resistance of 1.69 m $ \Omega $ $ \cdot $ cm $ ^{2} $, breakdown voltage of 1416 V and power figure of merit of 1.19 GW/cm $ ^{2} $, showing merits of both low turn-on voltage and high breakdown voltage. The device performance was remarkably improved when compared to that of the regular SBD and field-plated SBD.

Keywords: $ \beta $-Ga $ _{2} $O $ _{3} $; Schottky barrier diode(SBD); trenched structure; power device simulation

基金信息

安徽省自然科学基金资助项目（2208085MF177）

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