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一种高灵敏电阻式柔性压力传感器研制及应用

Development and application of an ultra-sensitive resistive flexible strain sensor

期刊信息

合肥工业大学(自然科学版),2025年3月,第48卷第3期:297-301,342

DOI: 10.3969/j.issn.1003-5060.2025.03.002

作者信息

滕飞 $ ^{1} $,刘平 $ ^{2} $,郭欣欣 $ ^{1} $,葛春雨 $ ^{1} $,刘健 $ ^{1} $,黄厚柱 $ ^{1} $

(1. 国网安徽省电力有限公司 滁州供电公司, 安徽 滁州 239000; 2. 合肥工业大学 微电子学院, 安徽 合肥 230601)

摘要和关键词

摘要: 针对智能机器人抓取物体需要精准压力控制的需求, 文章采用改性多壁碳纳米管(MWCNTs)、硅橡胶(silicone rubber, SR)材料, 结合丝网印刷工艺, 制备一种具有双层裂纹结构的高灵敏电阻式柔性压力传感器。首先介绍该传感器制作流程, 并表征改性碳纳米管的化学特性; 然后分析并优化传感器上、下层导电填料的配比及丝网印刷工艺参数, 测试传感器静态和动态特性; 最后将传感器应用于机器人智能抓取。结果表明, 文章所研制的基于双层裂纹结构的柔性压力传感器具有超高灵敏度(应变系数 GF 约为 2451)和快速响应时间(42 ms)。将该传感器安装到机械夹爪上, 通过微控制单元(microcontroller unit, MCU)芯片、模数转换芯片、分压电路以及 LabVIEW 上位机可以实现对机械夹爪抓取过程中压力的实时检测, 为智能机器人实现精准抓取提供了一种新方案。

关键词: 应变传感器;电阻式;裂纹;微结构;高灵敏

Authors

TENG Fei $ ^{1} $, LIU Ping $ ^{2} $, GUO Xinxin $ ^{1} $, GE Chunyu $ ^{1} $, LIU Jian $ ^{1} $, HUANG Houzhu $ ^{1} $

(1. Chuzhou Power Supply Company, State Grid Anhui Electric Power Co., Ltd., Chuzhou 239000, China; 2. School of Microelectronics, Hefei University of Technology, Hefei 230601, China)

Abstract and Keywords

Abstract: In response to the requirement of precise pressure control of the grasping process of intelligent robots, this paper adopted modified multi-walled carbon nanotubes (MWCNTs) and silicone rubber (SR) as materials, combined with the screen-printing process, to prepare an ultra-sensitive resistive flexible strain sensor with a double-layer crack structure. The fabrication process of the sensor was firstly described, and the chemical properties of the modified carbon nanotubes were characterized. The ratio of conductive fillers of the upper and lower layers of the sensor and the screen-printing process parameters were analyzed and optimized, and the static and dynamic characteristics of the sensor were tested. Finally, the sensor was applied to intelligent robot grasping control. The results show that the flexible strain sensor based on the double-layer crack structure fabricated by the above process has ultra-high sensitivity (GF is about 2 451) and fast response time (42 ms). The sensor was installed on the mechanical gripper, and microcontroller unit (MCU) chip, A/D conversion chip, voltage divider circuit and LabVIEW upper computer were used to realize the real-time detection of the pressure in the grasping process of the mechanical gripper, which provides a new solution for the precise grasping of intelligent robots.

Keywords: strain sensor; resistive; crack; microstructure; high sensitivity

基金信息

浙江省“领雁”研发攻关计划资助项目(2022C03052);国网安徽省电力有限公司滁州供电公司科技资助项目(B312M023000R)

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