多点并联驱动精密压力机几何误差建模与灵敏度分析

为提高芯片塑封精度,文章以一种多点并联驱动精密压力机为研究对象,提出一种精度分析和误差分配方法。介绍了多点并联驱动压力机的拓扑结构,采用低序列阵列法描述了压力机传动系统各零部件之间的并联关系,并基于多体系统理论和齐次变换法构建了多点并联驱动精密压力机的位置误差传递模型和角度误差传递模型;以一阶敏感度函数为理论基础,建立多点并联驱动精密压力机的误差灵敏度分析模型,对求出的误差传递模型中各项误差进行灵敏度分析,找到了位置误差和角度误差的主要误差源并计算出各项几何误差的灵敏度系数,以此为依据为整机的精度分配提供了方法。

To improve the precision of chip packaging, this paper takes a multi-point parallel drive precision press as the research object and proposes a method for accuracy analysis and error allocation. The paper describes the topological structure of the multi-point parallel drive press, and uses the low sequence array method to describe the parallel relationship between various components of the press transmission system. Based on the multi-body system theory and the homogeneous transformation method, the position error transfer model and angle error transfer model of the multi-point parallel drive precision press were constructed. Based on the theory of the first-order sensitivity function, the error sensitivity analysis model of the multi-point parallel drive precision press was established. The sensitivity analysis of each error in the error transfer model was carried out, the main error sources of position error and angle error were found, and the sensitivity coefficient of each geometric error was calculated, which provides a method for the accuracy allocation of the whole machine.