DOI:10.3969/j.issn.1003-5060.2023.10.012
可穿戴的光固化型高灵敏柔性应变传感器
沈亮 $ ^{1} $,刘平 $ ^{1} $,童伟 $ ^{1} $,吴顺哥 $ ^{1} $,刘彩霞 $ ^{1,2} $,黄英 $ ^{1} $
(1. 合肥工业大学微电子学院, 安徽 合肥 230601; 2. 合肥工业大学物理学院, 安徽 合肥 230601)
摘要
柔性应变传感器具有良好的体表共形特性,在可穿戴医疗电子中备受关注。文章采用苯乙烯-马来酸酐(styrene-maleic anhydride, SMA)与氨基化多壁碳纳米管(aminoated multiwalled carbon nanotubes, aminoMWCNTs)的酰胺化反应,得到聚合物包裹的碳纳米管。以弹性棉线作为基材,先后浸渍进入低质量分数和高质量分数的酰胺化碳纳米管/UV胶混合液并进行紫外光固化,固化完成后通过预拉伸制备具有裂纹结构的超灵敏柔性应变传感器。结果表明,双应变层结合裂纹结构的设计方案使得该传感器具有宽的检测范围(0~40%应变)、高应变系数 $ G_{r}(0\sim13\%\text{应变},G_{r}=4\ 000) $、低检测限(0.2%应变)和良好的重复性(1 000次加/卸载循环)。该传感器对人体脉搏进行测量得到相关的人体健康参数。
关键词
双层协同导电网络;光固化;裂纹;高灵敏度;电阻式
中图分类号:TP212
文献标志码:A
文章编号:1003-5060(2023)10-1374-07
Wearable light curing type highly sensitive flexible strain sensor
SHEN Liang $ ^{1} $, LIU Ping $ ^{1} $, TONG Wei $ ^{1} $, WU Shunge $ ^{1} $, LIU Caixia $ ^{1,2} $, HUANG Ying $ ^{1} $
(1. School of Microelectronics, Hefei University of Technology, Hefei 230601, China; 2. School of Physics, Hefei University of Technology, Hefei 230601, China)
Abstract
Due to its good body surface conformal characteristics, flexible strain sensor has attracted much attention in wearable medical electronics. In this paper, polymer-coated carbon nanotubes were prepared by amination of styrene-maleic anhydride (SMA) with aminated multiwalled carbon nanotubes (amino-MWCNTs). As the base material, elastic cotton thread was impregnated into the mixture of low mass fraction and high mass fraction of aminated carbon nanotubes/UV glue and cured by UV light, and the ultra-sensitive flexible strain sensor with crack structure was prepared by pre-stretching after curing. The results show that the sensor has a wide detection range (0-40% strain), high sensitivity $ G_{f} $ (0-13% strain, $ G_{f}=4\ 000 $), a low detection limit (0.2% strain) and good repeatability (1 000 loading/unloading cycles) through the design of double strain layer combined with crack structure. The sensor can measure the pulse of the human body and get relevant human health parameters.
Keywords
double-layer cooperative conductive network; light curing; crack; high sensitivity; resistance type
收稿日期:2022-01-17
修回日期:
基金项目:浙江省“尖兵”“领雁”研发攻关计划资助项目(2022C03052);中央高校基本科研业务费专项资金资助项目(JZ2020HGTB0027)