基于 PSD 的汽轮机转子轴振动传感器

针对汽轮机转子轴振动的测量需求,文章研制一款基于位置敏感器件(position sensitive detector, PSD)的振动传感器。建立传感器的灵敏度模型,根据模型得出传感器的最优结构参数,并设计低噪声的信号处理电路;通过实验对该传感器进行标定和测试,并与商用电涡流传感器进行对比测试。结果表明:振动传感器的灵敏度为0.33 V/mm,测量范围为2 mm,振幅分辨率为4 $ \mu $m,频率响应范围为10~325 Hz,重复实验标准差优于3 $ \mu $m;与商用电涡流传感器的测量结果具有良好一致性,可用于汽轮机转子轴振动的检测。

In response to the measurement requirements of the rotor shaft vibration of the steam turbine, a vibration sensor based on position sensitive detector (PSD) is designed. The sensitivity model of the sensor is established, the optimal structural parameters of the sensor are obtained according to the model, and a low-noise signal processing circuit is designed. The sensor is calibrated and tested through experiments, and the results show that the sensitivity is 0.33 V/mm, the measurement range is 2 mm, the amplitude resolution is 4 $ \mu $m, the frequency response range is 10-325 Hz, and the standard deviation of repeated experiments is better than 3 $ \mu $m. Additionally, it is compared with the commercial eddy current sensor, and the measurement results of the two are consistent. Therefore, the vibration sensor in this study can be used to detect the vibration of the rotor shaft of the steam turbine.